Invention Grant
- Patent Title: Vibrator element, vibrator, oscillator, and electronic device
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Application No.: US13158662Application Date: 2011-06-13
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Publication No.: US08416027B2Publication Date: 2013-04-09
- Inventor: Teruo Takizawa
- Applicant: Teruo Takizawa
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-170556 20100729
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H01L41/053

Abstract:
A vibrator element includes: a base having a mounting surface; a vibrating arm which is extended from the base and has a first surface and a second surface that faces the first surface and is positioned on the mounting surface side, and which performs flexural vibration in a direction normal to the first and second surfaces; and a laminated structure which is provided on at least one of the first and second surfaces of the vibrating arm, and which includes at least a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, in which the vibrating arm is warped toward the mounting surface side.
Public/Granted literature
- US20120025923A1 VIBRATOR ELEMENT, VIBRATOR, OSCILLATOR, AND ELECTRONIC DEVICE Public/Granted day:2012-02-02
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