Invention Grant
US08416402B2 Method and apparatus for inspecting defects 有权
检查缺陷的方法和装置

Method and apparatus for inspecting defects
Abstract:
To provide a defect inspection apparatus for inspecting defects of a specimen without lowering resolution of a lens, without depending on a polarization characteristic of a defect scattered light, and with high detection sensitivity that is realized by the following. A detection optical path is branched by at least one of spectral splitting and polarization splitting, a spatial filter in the form of a two-dimensional array is disposed after the branch, and only diffracted light is shielded by the spatial filter in the form of a two-dimensional array.
Public/Granted literature
Information query
Patent Agency Ranking
0/0