Invention Grant
- Patent Title: Method for determination of residual errors
- Patent Title (中): 确定残差的方法
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Application No.: US12513452Application Date: 2007-10-23
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Publication No.: US08416412B2Publication Date: 2013-04-09
- Inventor: Uwe Schellhorn , Matthias Manger
- Applicant: Uwe Schellhorn , Matthias Manger
- Applicant Address: DE Jena
- Assignee: Carl Zeiss SMS GmbH
- Current Assignee: Carl Zeiss SMS GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- International Application: PCT/EP2007/009201 WO 20071023
- International Announcement: WO2008/055589 WO 20080515
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G01B11/14 ; G06F19/00 ; G01C17/38
Abstract:
There is provided a method for determining residual errors, compromising the following steps: in a first step, a test plate comprising a first pattern is used, and in a second step, a test plate comprising a second pattern which is reflected and/or rotated with respect to the first step is used.
Public/Granted literature
- US20100097608A1 METHOD FOR DETERMINATION OF RESIDUAL ERRORS Public/Granted day:2010-04-22
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