Invention Grant
- Patent Title: Condenser microphone array chip
- Patent Title (中): 冷凝器麦克风阵列芯片
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Application No.: US13245696Application Date: 2011-09-26
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Publication No.: US08416970B2Publication Date: 2013-04-09
- Inventor: Kazushi Sakurauchi , Tamito Suzuki , Yukitoshi Suzuki
- Applicant: Kazushi Sakurauchi , Tamito Suzuki , Yukitoshi Suzuki
- Applicant Address: JP Hamamatsu-Shi, Shizuoka-ken
- Assignee: Yamaha Corporation
- Current Assignee: Yamaha Corporation
- Current Assignee Address: JP Hamamatsu-Shi, Shizuoka-ken
- Agency: Dickstein Shapiro LLP
- Priority: JP2010-220575 20100930
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
A plurality of structures of condenser microphones is fabricated in a single condenser microphone array chip. The condenser microphone array chip includes a substrate having a plurality of openings serving as air cavities, a first insulating layer formed in the outer periphery of the openings, a first electrode layer stretched over each of the openings, a second insulating layer formed above the first electrode layer in the outer periphery of the openings, a second electrode layer formed above the second insulating layer relative to the first electrode layer via an air gap therebetween. The structures are connected via a plurality of bridges and separated via a plurality of channels therebetween. The channels circumvent the bridges so that at least the second insulating layer is partially removed from the channels. The bridges are formed using the second electrode layer serving as wiring for electrically connecting the structures of condenser microphones.
Public/Granted literature
- US20120082325A1 CONDENSER MICROPHONE ARRAY CHIP Public/Granted day:2012-04-05
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