Invention Grant
US08418111B2 Method and apparatus for achieving multiple patterning technology compliant design layout
有权
用于实现多种图案化技术兼容的设计布局的方法和装置
- Patent Title: Method and apparatus for achieving multiple patterning technology compliant design layout
- Patent Title (中): 用于实现多种图案化技术兼容的设计布局的方法和装置
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Application No.: US12953661Application Date: 2010-11-24
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Publication No.: US08418111B2Publication Date: 2013-04-09
- Inventor: Huang-Yu Chen , Fang-Yu Fan , Yuan-Te Hou , Lee-Chung Lu , Ru-Gun Liu , Ken-Hsien Hsieh , Lee Fung Song , Wen-Chun Huang , Li-Chun Tien
- Applicant: Huang-Yu Chen , Fang-Yu Fan , Yuan-Te Hou , Lee-Chung Lu , Ru-Gun Liu , Ken-Hsien Hsieh , Lee Fung Song , Wen-Chun Huang , Li-Chun Tien
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method and apparatus for achieving multiple patterning compliant technology design layouts is provided. An exemplary method includes providing a routing grid having routing tracks; designating each of the routing tracks one of at least two colors; applying a pattern layout having a plurality of features to the routing grid, wherein each of the plurality of features corresponds with at least one routing track; and applying a feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout. If the pattern layout is not a multiple patterning compliant layout, the pattern layout may be modified until a multiple patterning compliant layout is achieved. If the pattern layout is a multiple patterning compliant layout, the method includes coloring each of the plurality of features based on the color of each feature's corresponding at least one routing track, thereby forming a colored pattern layout, and generating at least two masks with the features of the colored pattern layout. Each mask includes features of a single color.
Public/Granted literature
- US20120131528A1 METHOD AND APPARATUS FOR ACHIEVING MULTIPLE PATTERNING TECHNOLOGY COMPLIANT DESIGN LAYOUT Public/Granted day:2012-05-24
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