Invention Grant
- Patent Title: Stage for scanning probe microscopy and sample observation method
- Patent Title (中): 扫描探针显微镜和样品观察方法的阶段
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Application No.: US12994581Application Date: 2008-06-27
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Publication No.: US08418261B2Publication Date: 2013-04-09
- Inventor: Nahoko Kasai , Yuichi Harada , Chandra Sekar Ramanujan
- Applicant: Nahoko Kasai , Yuichi Harada , Chandra Sekar Ramanujan
- Applicant Address: JP Tokyo GB Oxford
- Assignee: Nippon Telegraph and Telephone Corporation,Isis Innovation Limited
- Current Assignee: Nippon Telegraph and Telephone Corporation,Isis Innovation Limited
- Current Assignee Address: JP Tokyo GB Oxford
- Agency: Harness, Dickey & Pierce, P.L.C.
- International Application: PCT/JP2008/062118 WO 20080627
- International Announcement: WO2009/157096 WO 20091230
- Main IPC: G01Q70/02
- IPC: G01Q70/02

Abstract:
It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is irradiated from a bottom surface of the sample substrate onto the sample through the opening.
Public/Granted literature
- US20110099673A1 STAGE FOR SCANNING PROBE MICROSCOPY AND SAMPLE OBSERVATION METHOD Public/Granted day:2011-04-28
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