Invention Grant
- Patent Title: Micro electrical mechanical magnetic field sensor utilizing modified inertial elements
- Patent Title (中): 微电机械磁场传感器利用改进的惯性元件
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Application No.: US12703516Application Date: 2010-02-10
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Publication No.: US08418556B2Publication Date: 2013-04-16
- Inventor: Po-Jui Chen , Martin Eckardt , Axel Franke
- Applicant: Po-Jui Chen , Martin Eckardt , Axel Franke
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.
Public/Granted literature
- US20110192229A1 MICRO ELECTRICAL MECHANICAL MAGNETIC FIELD SENSOR UTILIZING MODIFIED INERTIAL ELEMENTS Public/Granted day:2011-08-11
Information query
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