Invention Grant
- Patent Title: Tri-axis accelerometer having a single proof mass and fully differential output signals
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Application No.: US12825046Application Date: 2010-06-28
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Publication No.: US08418559B2Publication Date: 2013-04-16
- Inventor: Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
- Applicant: Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Main IPC: G01P15/09
- IPC: G01P15/09

Abstract:
A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
Public/Granted literature
- US20100263447A1 TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERENTIAL OUTPUT SIGNALS Public/Granted day:2010-10-21
Information query
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