Invention Grant
US08418650B2 Inner electrode for barrier film formation and apparatus for film formation
有权
用于阻挡膜形成的内部电极和用于成膜的装置
- Patent Title: Inner electrode for barrier film formation and apparatus for film formation
- Patent Title (中): 用于阻挡膜形成的内部电极和用于成膜的装置
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Application No.: US13229393Application Date: 2011-09-09
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Publication No.: US08418650B2Publication Date: 2013-04-16
- Inventor: Seiji Goto , Hideo Yamakoshi , Atsushi Ueda , Kenichi Okamoto , Yuji Asahara , Minoru Danno
- Applicant: Seiji Goto , Hideo Yamakoshi , Atsushi Ueda , Kenichi Okamoto , Yuji Asahara , Minoru Danno
- Applicant Address: JP Aichi
- Assignee: Mitsubishi Heavy Industries Food & Packaging Machinery Co., Ltd.
- Current Assignee: Mitsubishi Heavy Industries Food & Packaging Machinery Co., Ltd.
- Current Assignee Address: JP Aichi
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2004-303033 20041018
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/50 ; C23F1/00 ; H01L21/306

Abstract:
An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe having a gas flow path to supply a medium gas and an insulating member screwed into an end portion of the gas supply pipe to be flush therewith and having a gas outlet communicated with the gas flow path.
Public/Granted literature
- US20120000771A1 INNER ELECTRODE FOR BARRIER FILM FORMATION AND APPARATUS FOR FILM FORMATION Public/Granted day:2012-01-05
Information query
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