Invention Grant
US08418650B2 Inner electrode for barrier film formation and apparatus for film formation 有权
用于阻挡膜形成的内部电极和用于成膜的装置

Inner electrode for barrier film formation and apparatus for film formation
Abstract:
An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe having a gas flow path to supply a medium gas and an insulating member screwed into an end portion of the gas supply pipe to be flush therewith and having a gas outlet communicated with the gas flow path.
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