Invention Grant
- Patent Title: Purging apparatus and purging method
- Patent Title (中): 清洗装置和清洗方法
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Application No.: US13265345Application Date: 2010-04-13
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Publication No.: US08418733B2Publication Date: 2013-04-16
- Inventor: Nobuhide Shikata , Takanori Izumi
- Applicant: Nobuhide Shikata , Takanori Izumi
- Applicant Address: JP Kyoto
- Assignee: Murata Machinery, Ltd.
- Current Assignee: Murata Machinery, Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2009-115077 20090512
- International Application: PCT/JP2010/002662 WO 20100413
- International Announcement: WO2010/131414 WO 20101118
- Main IPC: B65B1/04
- IPC: B65B1/04

Abstract:
A pod opener is an apparatus for purging the inside of a reticle pod having a pod cover and an openable bottom lid by supplying and discharging a clean gas to and from the inside of the reticle pod. The pod opener includes a stage, an elevator driving mechanism, a latch mechanism, and a supplying-discharging section. The stage can attach and remove the bottom lid to and from the pod cover. The elevator driving mechanism can move the stage. The latch mechanism serves to move a latch member that locks the bottom lid to the pod cover such that it cannot be detached and to release the locked state of the bottom lid. The supplying-discharging section starts purging before the latch member has completed an operation of locking the bottom lid to the pod cover.
Public/Granted literature
- US20120042988A1 PURGIGN APPARATUS AND PURGING METHOD Public/Granted day:2012-02-23
Information query
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