Invention Grant
- Patent Title: Reticle POD with sensor
- Patent Title (中): 带传感器的光罩POD
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Application No.: US13004096Application Date: 2011-01-11
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Publication No.: US08418853B2Publication Date: 2013-04-16
- Inventor: Chen-Wei Ku , Shao Wei Lu , Chin-Ming Lin
- Applicant: Chen-Wei Ku , Shao Wei Lu , Chin-Ming Lin
- Applicant Address: TW Taipei County
- Assignee: Gudeng Precision Industrial Co, Ltd
- Current Assignee: Gudeng Precision Industrial Co, Ltd
- Current Assignee Address: TW Taipei County
- Agency: Sinorica, LLC
- Agent Ming Chow
- Priority: TW99123924A 20100721
- Main IPC: B65D85/00
- IPC: B65D85/00

Abstract:
An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.
Public/Granted literature
- US20120018347A1 Reticle POD with Sensor Public/Granted day:2012-01-26
Information query
IPC分类: