Invention Grant
US08418853B2 Reticle POD with sensor 有权
带传感器的光罩POD

Reticle POD with sensor
Abstract:
An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.
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