A process for printing inkjet ink and other aqueous compositions through silicon-based microelectromechanical printer structures is disclosed that suppresses the normal dissolution of the silicon device components in contact with the aqueous composition. Inkjet ink and other aqueous compositions used in the process contain the soluble salts of organic aromatic azo compounds in sufficient concentrations to inhibit silicon corrosion. The useful lifetime of microelectromechanical fluidic devices based on silicon fabrication is extended.