Invention Grant
US08419187B2 Adaptive optics apparatus that corrects aberration of examination object and image taking apparatus including adaptive optics apparatus
有权
自适应光学装置，其校正检查对象的像差和包括自适应光学装置的摄像装置
- Patent Title: Adaptive optics apparatus that corrects aberration of examination object and image taking apparatus including adaptive optics apparatus
- Patent Title (中): 自适应光学装置，其校正检查对象的像差和包括自适应光学装置的摄像装置
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Application No.: US12907756Application Date: 2010-10-19
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Publication No.: US08419187B2Publication Date: 2013-04-16
- Inventor: Kenichi Saito
- Applicant: Kenichi Saito
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2009-244961 20091023
- Main IPC: A61B3/14
- IPC: A61B3/14 ; A61B3/10 ; A61B3/00
Abstract:
An adaptive optics apparatus includes a first light modulating unit configured to perform modulation in a polarization direction of one of two polarized light components in light emitted from a light source, a changing unit configured to rotate the light modulated by the first light modulating unit by 90 degrees, a second light modulating unit configured to modulate the light changed by the changing unit in the polarization direction, and an irradiating unit configured to irradiate a measurement object with the light modulated by the second light modulating unit.
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