Invention Grant
US08419412B2 Nano-imprint mold and substrate with uneven patterns manufactured by using the mold 有权
纳米压印模具和使用模具制造的不均匀图案的基板

Nano-imprint mold and substrate with uneven patterns manufactured by using the mold
Abstract:
According to one embodiment, a nano-imprint mold includes plural pairs of first and second protrusions formed on a base layer, each of which is formed along the same straight line. Each protrusion has a top surface and four side surfaces. The first and second protrusions are mirror-symmetrical with each other. A first side surface of the first protrusion and a second side surface of the second protrusion face each other. A first angle between the first side surface or the second side surface and a main surface of the base layer is not less than 85° and not more than 90°. A second angle between a third side surface in the first protrusion or a fourth side surface in the second protrusion and the main surface of the base layer is not less than 70° and not more than 88°. The first angle is larger than the second angle.
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