Invention Grant
US08419857B2 Electron beam vapor deposition apparatus and method of coating 有权
电子束气相沉积装置及其涂覆方法

Electron beam vapor deposition apparatus and method of coating
Abstract:
An electron beam vapor deposition apparatus includes a coating chamber including a coating zone for depositing a coating on a work piece. A coating device includes at least one crucible for presenting at least one source coating material. The coating device includes a first deposition mode of depositing the at least one source coating material and a second deposition mode of depositing the at least one source coating material. At least one electron beam source evaporates the at least one source coating material for deposit onto the work piece. A controller is configured to control a speed of movement of the work piece in the coating zone during the coating operation in response to the first deposition mode and the second deposition mode.
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