Invention Grant
- Patent Title: Method of preparing electrolytic copper solution acidified with sulfuric acid, sulfuric-acid-acidified electrolytic copper solution prepared by the preparation method, and electrodeposited copper film
- Patent Title (中): 制备用硫酸酸化的电解铜溶液,通过制备方法制备的硫酸酸化电解铜溶液和电沉积铜膜的方法
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Application No.: US12444020Application Date: 2007-10-02
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Publication No.: US08419920B2Publication Date: 2013-04-16
- Inventor: Sakiko Tomonaga , Makoto Dobashi , Junshi Yoshioka , Ayumu Tateoka , Mitsuyoshi Matsuda , Hisao Sakai
- Applicant: Sakiko Tomonaga , Makoto Dobashi , Junshi Yoshioka , Ayumu Tateoka , Mitsuyoshi Matsuda , Hisao Sakai
- Applicant Address: JP Tokyo
- Assignee: Mitsui Mining & Smelting Co., Ltd.
- Current Assignee: Mitsui Mining & Smelting Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2006-272327 20061003
- International Application: PCT/JP2007/069294 WO 20071002
- International Announcement: WO2008/041706 WO 20080410
- Main IPC: C25D3/38
- IPC: C25D3/38

Abstract:
An object of the present invention is to provide a method for preparing a sulfuric acid base copper electrolytic solution used for formation of an electro-deposited copper film comprising a surface excellent in smoothness and gloss when formed by using the solution just after preparation and is prepared by using mono-sulfides. To achieve the object, a sulfuric acid base copper electrolytic solution is made to contain a sulfonated active sulfur compound, the bis(3-sulfopropyl)disulfide which is recommended for formation of a glossy electro-deposited copper film. And the bis(3-sulfopropyl)disulfide contained is obtained by converting a 3-mercapto-1-propanesulfonic acid into the bis(3-sulfopropyl)disulfide in an aqueous solution of the 3-mercapto-1-propanesulfonic acid by an oxidation reaction. In the oxidation reaction, an air bubbling method is preferably used to prevent oxidative decomposition of the 3-mercapto-1-propanesulfonic acid.
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