Invention Grant
US08419957B2 Method for producing a micromechanical component having a filler layer and a masking layer
有权
用于制造具有填充层和掩模层的微机械部件的方法
- Patent Title: Method for producing a micromechanical component having a filler layer and a masking layer
- Patent Title (中): 用于制造具有填充层和掩模层的微机械部件的方法
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Application No.: US12450659Application Date: 2008-04-08
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Publication No.: US08419957B2Publication Date: 2013-04-16
- Inventor: Roland Scheuerer , Heribert Weber , Eckhard Graf
- Applicant: Roland Scheuerer , Heribert Weber , Eckhard Graf
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007019647 20070426
- International Application: PCT/EP2008/054187 WO 20080408
- International Announcement: WO2008/132024 WO 20081106
- Main IPC: C03C15/00
- IPC: C03C15/00

Abstract:
A method for producing a micromechanical component is proposed, a trench structure being substantially completely filled up by a first filler layer, and a first mask layer being applied on the first filler layer, on which in turn a second filler layer and a second mask layer are applied. A micromechanical component is also proposed, the first filler layer filling up the trench structure of the micromechanical component and at the same time forming a movable sensor structure.
Public/Granted literature
- US20100089868A1 METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A FILLER LAYER AND A MASKING LAYER Public/Granted day:2010-04-15
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