Invention Grant
US08419957B2 Method for producing a micromechanical component having a filler layer and a masking layer 有权
用于制造具有填充层和掩模层的微机械部件的方法

Method for producing a micromechanical component having a filler layer and a masking layer
Abstract:
A method for producing a micromechanical component is proposed, a trench structure being substantially completely filled up by a first filler layer, and a first mask layer being applied on the first filler layer, on which in turn a second filler layer and a second mask layer are applied. A micromechanical component is also proposed, the first filler layer filling up the trench structure of the micromechanical component and at the same time forming a movable sensor structure.
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