Invention Grant
US08420171B2 Forming heaters for phase change memories 有权
成型加热器用于相变存储器

Forming heaters for phase change memories
Abstract:
A heater for a phase change memory may be formed by depositing a first material into a trench such that the material is thicker on the side wall than on the bottom of the trench. In one embodiment, because the trench side walls are of a different material than the bottom, differential deposition occurs. Then a heater material is deposited thereover. The heater material may react with the first material at the bottom of the trench to make Ohmic contact with an underlying metal layer. As a result, a vertical heater may be formed which is capable of making a small area contact with an overlying chalcogenide material.
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