Invention Grant
- Patent Title: Forming heaters for phase change memories
- Patent Title (中): 成型加热器用于相变存储器
-
Application No.: US12944134Application Date: 2010-11-11
-
Publication No.: US08420171B2Publication Date: 2013-04-16
- Inventor: Carla Maria Lazzari , Silvia Borsari
- Applicant: Carla Maria Lazzari , Silvia Borsari
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dorsey & Whitney LLP
- Main IPC: B32B3/10
- IPC: B32B3/10

Abstract:
A heater for a phase change memory may be formed by depositing a first material into a trench such that the material is thicker on the side wall than on the bottom of the trench. In one embodiment, because the trench side walls are of a different material than the bottom, differential deposition occurs. Then a heater material is deposited thereover. The heater material may react with the first material at the bottom of the trench to make Ohmic contact with an underlying metal layer. As a result, a vertical heater may be formed which is capable of making a small area contact with an overlying chalcogenide material.
Public/Granted literature
- US20120121864A1 Forming Heaters for Phase Change Memories Public/Granted day:2012-05-17
Information query