Invention Grant
US08420291B2 Positive photosensitive resin composition, method for forming pattern, electronic component 有权
正型感光性树脂组合物,形成图案的方法,电子部件

Positive photosensitive resin composition, method for forming pattern, electronic component
Abstract:
Provided are a positive photosensitive resin composition that is developable in an alkaline aqueous solution and gives a good shaped pattern that is excellent in heat resistance and mechanical property, a method for producing the pattern and an electronic component. The positive photosensitive resin composition contains (a) polybenzoxazole or a polybenzoxazole precursor polymer having a structural unit represented by either a general formula (1) or (2) and satisfying conditions (i) and/or (ii), (b) a compound that generates an acid by being irradiated with active light ray and (c) a compound having a structure represented by a general formula (3) crosslinkable or polymerizable with said component (a).
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