Invention Grant
US08420291B2 Positive photosensitive resin composition, method for forming pattern, electronic component
有权
正型感光性树脂组合物,形成图案的方法,电子部件
- Patent Title: Positive photosensitive resin composition, method for forming pattern, electronic component
- Patent Title (中): 正型感光性树脂组合物,形成图案的方法,电子部件
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Application No.: US12739127Application Date: 2008-10-29
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Publication No.: US08420291B2Publication Date: 2013-04-16
- Inventor: Tomonori Minegishi , Tomoko Kawamura , Masayuki Ohe , Yuki Nakamura
- Applicant: Tomonori Minegishi , Tomoko Kawamura , Masayuki Ohe , Yuki Nakamura
- Applicant Address: JP Tokyo
- Assignee: Hitachi Chemical Dupont Microsystems, Ltd.
- Current Assignee: Hitachi Chemical Dupont Microsystems, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Griffin & Szipl, P.C.
- Priority: JP2007-280501 20071029
- International Application: PCT/JP2008/069652 WO 20081029
- International Announcement: WO2009/057638 WO 20090507
- Main IPC: H05K1/00
- IPC: H05K1/00 ; G03F7/20

Abstract:
Provided are a positive photosensitive resin composition that is developable in an alkaline aqueous solution and gives a good shaped pattern that is excellent in heat resistance and mechanical property, a method for producing the pattern and an electronic component. The positive photosensitive resin composition contains (a) polybenzoxazole or a polybenzoxazole precursor polymer having a structural unit represented by either a general formula (1) or (2) and satisfying conditions (i) and/or (ii), (b) a compound that generates an acid by being irradiated with active light ray and (c) a compound having a structure represented by a general formula (3) crosslinkable or polymerizable with said component (a).
Public/Granted literature
- US20100258336A1 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING PATTERN, ELECTRONIC COMPONENT Public/Granted day:2010-10-14
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