Invention Grant
- Patent Title: Semiconductor memory and manufacturing method thereof
- Patent Title (中): 半导体存储器及其制造方法
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Application No.: US13187782Application Date: 2011-07-21
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Publication No.: US08420408B2Publication Date: 2013-04-16
- Inventor: Min Suk Lee , Byung Gu Gyun , Bo Kyoung Jung , Chang Hyup Shin
- Applicant: Min Suk Lee , Byung Gu Gyun , Bo Kyoung Jung , Chang Hyup Shin
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2010-0070527 20100721
- Main IPC: H01L43/08
- IPC: H01L43/08

Abstract:
A method for manufacturing a semiconductor memory device includes sequentially depositing a bottom electrode layer, a magnetic tunnel junction (MTJ) layer, a first top electrode layer, a second top electrode layer and a mask layer, etching the mask layer and forming a mask pattern, etching the second top electrode layer and the first top electrode layer by using the mask pattern as an etch barrier, etching the MTJ layer by using the mask layer and the second top electrode layer as an etch barrier, and etching the bottom electrode layer by using the first top electrode layer as an etch barrier.
Public/Granted literature
- US20120018826A1 SEMICONDUCTOR MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-01-26
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