Invention Grant
- Patent Title: MOS transistor and method for forming the same
- Patent Title (中): MOS晶体管及其形成方法
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Application No.: US13143591Application Date: 2011-01-27
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Publication No.: US08420492B2Publication Date: 2013-04-16
- Inventor: Huicai Zhong , Qingqing Liang , Da Yang , Chao Zhao
- Applicant: Huicai Zhong , Qingqing Liang , Da Yang , Chao Zhao
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Vierra Magen Marcus LLP
- International Application: PCT/CN2011/070695 WO 20110127
- International Announcement: WO2012/088779 WO 20120507
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
The invention provides a MOS transistor and a method for forming the MOS transistor. The MOS transistor includes a semiconductor substrate; a gate stack on the semiconductor substrate, and including a gate dielectric layer and a gate electrode on the semiconductor substrate in sequence; a source region and a drain region, respectively at sidewalls of the gate stack sidewalls of the gate stack and in the semiconductor; sacrificial metal spacers on sidewalls of the gate stack sidewalls of the gate stack, and having tensile stress or compressive stress. This invention scales down the equivalent oxide thickness, improves uniformity of device performance, raises carrier mobility and promotes device performance.
Public/Granted literature
- US20120168829A1 MOS TRANSISTOR AND METHOD FOR FORMING THE SAME Public/Granted day:2012-07-05
Information query
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