Invention Grant
- Patent Title: Method of producing a structure by layer transfer
- Patent Title (中): 通过层转移制造结构的方法
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Application No.: US12675927Application Date: 2008-09-11
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Publication No.: US08420500B2Publication Date: 2013-04-16
- Inventor: Brigitte Soulier-Bouchet , Sébastien Kerdiles , Walter Schwarzenbach
- Applicant: Brigitte Soulier-Bouchet , Sébastien Kerdiles , Walter Schwarzenbach
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: Winston & Strawn LLP
- Priority: FR0757511 20070912
- International Application: PCT/EP2008/062018 WO 20080911
- International Announcement: WO2009/034113 WO 20090319
- Main IPC: H01L21/30
- IPC: H01L21/30

Abstract:
The invention relates to a method of producing a semiconductor structure by transferring a layer of a donor substrate to a receiver substrate, with the creation of an embrittlement zone in the donor substrate to define the transfer layer, and the treatment of the surface of one of the substrates to increase the bonding strength between them, followed by the direct wafer bonding of the substrates and the detachment of the donor substrate at the embrittlement zone to form the semiconductor structure, in which the surface of the receiver substrate, except for a peripheral crown, is covered with the transferred layer. The treatment of the substrate surface is controlled so that the bonding strength between the substrates is lower in a peripheral area than in a central area. The peripheral area has a width at least equal to the that of the crown and less than 10 mm.
Public/Granted literature
- US20100304507A1 METHOD OF PRODUCING A STRUCTURE BY LAYER TRANSFER Public/Granted day:2010-12-02
Information query
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