The present invention is directed to a fluorosilane represented by (L)3-Si—(CH2)n—(Z1)a—[C(X1)]x—(Z2)l-Q1-Rf where each n is independently an integer from 1 to 12; L is independently chosen from a hydrolysable or non-hydrolysable monovalent group; Rf is chosen from a C2-C12 perfluoroalkyl provided that: i) one fluorine atom of the perfluoroalkyl can be optionally replaced by hydrogen, and/or ii) the perfluoroalkyl can be optionally interrupted by at least one oxygen, methylene, or ethylene; Q1 is chosen from the group consisting of a C2-C12 hydrocarbylene optionally interrupted by at least one divalent organic group; X1 is chosen from O or S; —Z2 is —NH— and Z1 is from the group consisting of —O—, and —S—; each R1 is independently chosen from hydrogen, phenyl, or a monovalent C1-C8 alkyl optionally terminated by —C6H5, preferably H or CH3.