Invention Grant
- Patent Title: Oxide semiconductor device
- Patent Title (中): 氧化物半导体器件
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Application No.: US12846572Application Date: 2010-07-29
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Publication No.: US08421067B2Publication Date: 2013-04-16
- Inventor: Shunpei Yamazaki , Masashi Tsubuku , Kengo Akimoto , Miyuki Hosoba , Junichiro Sakata
- Applicant: Shunpei Yamazaki , Masashi Tsubuku , Kengo Akimoto , Miyuki Hosoba , Junichiro Sakata
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2009-180156 20090731
- Main IPC: H01L29/12
- IPC: H01L29/12

Abstract:
A semiconductor device having a structure which enables sufficient reduction in parasitic capacitance is provided. In addition, the operation speed of thin film transistors in a driver circuit is improved. In a bottom-gate thin film transistor in which an oxide insulating layer is in contact with a channel formation region in an oxide semiconductor layer, a source electrode layer and a drain electrode layer are formed in such a manner that they do not overlap with a gate electrode layer. Thus, the distance between the gate electrode layer and the source electrode layer and between the gate electrode layer and the drain electrode layer are increased; accordingly, parasitic capacitance can be reduced.
Public/Granted literature
- US20110024740A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-02-03
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