Invention Grant
US08421080B2 Thin-film transistor array device, organic EL display device, and method of manufacturing thin-film transistor array device
有权
薄膜晶体管阵列器件,有机EL显示器件以及制造薄膜晶体管阵列器件的方法
- Patent Title: Thin-film transistor array device, organic EL display device, and method of manufacturing thin-film transistor array device
- Patent Title (中): 薄膜晶体管阵列器件,有机EL显示器件以及制造薄膜晶体管阵列器件的方法
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Application No.: US13274491Application Date: 2011-10-17
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Publication No.: US08421080B2Publication Date: 2013-04-16
- Inventor: Tohru Saitoh , Tomoya Kato
- Applicant: Tohru Saitoh , Tomoya Kato
- Applicant Address: JP Osaka JP Hyogo
- Assignee: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- Current Assignee: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- Current Assignee Address: JP Osaka JP Hyogo
- Agency: Greenblum & Bernstein, P.L.C.
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/336

Abstract:
A thin-film transistor array device includes: a driving TFT including a first crystalline semiconductor film including crystal grains having a first average grain size; and a switching TFT including a second crystalline semiconductor film including crystal grains having a second average grain size that is smaller than the first average grain size. The first crystalline semiconductor film and the second crystalline semiconductor film are formed at the same time by irradiating a noncrystalline semiconductor film using a laser beam having a Gaussian light intensity distribution such that a temperature of the noncrystalline semiconductor film is within a range of 600° C. to 1100° C., and the first crystalline semiconductor film is formed such that the temperature of the noncrystalline semiconductor film is within a temperature range of 1100° C. to 1414° C. due to latent heat generated by the laser irradiation.
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