Invention Grant
US08421083B2 Semiconductor device with two oxide semiconductor layers and manufacturing method thereof
有权
具有两个氧化物半导体层的半导体器件及其制造方法
- Patent Title: Semiconductor device with two oxide semiconductor layers and manufacturing method thereof
- Patent Title (中): 具有两个氧化物半导体层的半导体器件及其制造方法
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Application No.: US12846556Application Date: 2010-07-29
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Publication No.: US08421083B2Publication Date: 2013-04-16
- Inventor: Shunpei Yamazaki , Kengo Akimoto , Masashi Tsubuku , Toshinari Sasaki , Hideaki Kuwabara
- Applicant: Shunpei Yamazaki , Kengo Akimoto , Masashi Tsubuku , Toshinari Sasaki , Hideaki Kuwabara
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2009-179722 20090731
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L21/00 ; G02F1/135

Abstract:
In a bottom-gate thin film transistor using the stack of the first oxide semiconductor layer and the second oxide semiconductor layer, an oxide insulating layer serving as a channel protective layer is formed over and in contact with part of the oxide semiconductor layer overlapping with a gate electrode layer. In the same step as formation of the insulating layer, an oxide insulating layer covering a peripheral portion (including a side surface) of the stack of the oxide semiconductor layers is formed.
Public/Granted literature
- US20110024751A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-02-03
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