Invention Grant
- Patent Title: Structure and method to enabling a borderless contact to source regions and drain regions of a complementary metal oxide semiconductor (CMOS) transistor
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Application No.: US13034791Application Date: 2011-02-25
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Publication No.: US08421160B2Publication Date: 2013-04-16
- Inventor: Reinaldo A. Vega
- Applicant: Reinaldo A. Vega
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
A semiconductor device that includes a gate structure on a channel region of a semiconductor substrate. A first source region and a first drain region are present in the semiconductor substrate on opposing sides of the gate structure. At least one spacer is present on the sidewalls of the gate structure. The at least one spacer includes a first spacer and a second spacer. The first spacer of the at least one spacer is in direct contact with the sidewall of the gate structure and is present over an entire width of the first source region and the first drain region. The second spacer of the at least one spacer extends from the first spacer of the at least one spacer and has a length that covers an entire length of a first source region and a first drain region.
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