Invention Grant
- Patent Title: Acceleration sensor having polarized piezoelectric layer interposed between sensing electrodes
- Patent Title (中): 加速度传感器具有夹在感测电极之间的极化压电层
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Application No.: US13328087Application Date: 2011-12-16
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Publication No.: US08421312B2Publication Date: 2013-04-16
- Inventor: Tsuyoshi Aoki , Kazuaki Kurihara , Shigeyoshi Umemiya
- Applicant: Tsuyoshi Aoki , Kazuaki Kurihara , Shigeyoshi Umemiya
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Main IPC: H01L41/04
- IPC: H01L41/04
Abstract:
An acceleration sensor includes a piezoelectric layer formed on a substrate, and sensing electrodes formed in the piezoelectric layer. In the acceleration sensor, the piezoelectric layer interposing between the sensing electrodes is polarized in a film thickness direction of the piezoelectric layer.
Public/Granted literature
- US20120086311A1 ACCELERATION SENSOR, VIBRATION POWER GENERATOR DEVICE, AND ACCELERATION SENSOR MANUFACTURING METHOD Public/Granted day:2012-04-12
Information query
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