Invention Grant
US08421546B2 Piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece, and method of manufacturing piezoelectric vibrator
失效
压电振子，振荡器，电子设备和无线电控制时计，以及制造压电振动器的方法
- Patent Title: Piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece, and method of manufacturing piezoelectric vibrator
- Patent Title (中): 压电振子，振荡器，电子设备和无线电控制时计，以及制造压电振动器的方法
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Application No.: US13035490Application Date: 2011-02-25
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Publication No.: US08421546B2Publication Date: 2013-04-16
- Inventor: Kazuyoshi Sugama , Kyoshi Aratake , Masashi Numata
- Applicant: Kazuyoshi Sugama , Kyoshi Aratake , Masashi Numata
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H01L41/00 ; H03H9/24
Abstract:
A piezoelectric vibrator according to the invention includes a base substrate and a lid substrate which are connected to each other and have a cavity formed therebetween; a piezoelectric vibrating reed that is mounted on the base substrate in the cavity; an external electrode that is formed on a lower surface of the base substrate; and a through electrode which is formed so as to pass through the base substrate, maintain the airtightness in the cavity, and electrically connect the piezoelectric vibrating reed with the external electrode. The through electrode is formed by a press molding by a forming mold having a pin, and includes a through hole of a taper-shaped section, in which a taper angle is in the range of 15° or more and 20° or less, and a conductive paste that is hardened after being filled in the through hole.
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