Invention Grant
- Patent Title: Boundary acoustic wave device having an interdigital transducer electrode in a groove
- Patent Title (中): 边界声波装置在沟槽中具有叉指式换能器电极
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Application No.: US12752167Application Date: 2010-04-01
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Publication No.: US08421558B2Publication Date: 2013-04-16
- Inventor: Takashi Yamane
- Applicant: Takashi Yamane
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2009-097932 20090414; JP2010-048082 20100304
- Main IPC: H03H9/13
- IPC: H03H9/13 ; H03H9/145 ; H03H9/15 ; H03H9/25

Abstract:
A boundary acoustic wave device includes a piezoelectric substrate having an upper surface in which grooves are provided, IDT electrodes which are at least partially embedded in the grooves in the upper surface of the piezoelectric substrate in a thickness direction of the IDT electrodes, and first and second dielectric layers stacked on the upper surface of the piezoelectric substrate. The second dielectric layer has an acoustic velocity greater than that of the first dielectric layer.
Public/Granted literature
- US20100259342A1 BOUNDARY ACOUSTIC WAVE DEVICE Public/Granted day:2010-10-14
Information query
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