An active spot array projection system particularly for microlithographic projection includes a spatial light modulator, such as a digital micromirror device, having individually addressable elements. A focusing array, such as a microlens array, focuses elements transverse segments of the light beam into spots. Within an imaging optic between the spatial light modulator and the focusing array, an spatial frequency filter attenuates certain spatial frequencies of light arising from the irregularities of the individually addressable elements while avoiding attenuating higher spatial frequencies of light arising from the peripheral boundaries of the individually addressable elements for regulating light distributions of the spots while limiting crosstalk between adjacent spots.