Invention Grant
- Patent Title: Method for inspecting defect of article to be inspected
- Patent Title (中): 检查待检物品缺陷的方法
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Application No.: US12712419Application Date: 2010-02-25
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Publication No.: US08422014B2Publication Date: 2013-04-16
- Inventor: Tatsuhiko Hatano , Kouichi Miyashita , Isao Shikata
- Applicant: Tatsuhiko Hatano , Kouichi Miyashita , Isao Shikata
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2007-224083 20070830
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
A method of inspecting defects in an inspection target includes (1) a step of supplying a particle-containing gas to one end face of the inspection target under pressure, applying in parallel a first laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, (2) a step of supplying a particle-containing gas to the one end face of the inspection target under pressure, applying in parallel a second laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, and (3) a step of specifying defects in the inspection target from photographic results obtained by the steps (1) and (2).
Public/Granted literature
- US20100201983A1 METHOD FOR INSPECTING DEFECT OF ARTICLE TO BE INSPECTED Public/Granted day:2010-08-12
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