Invention Grant
US08422169B2 Shallow trench discrete track media (DTM) and pattern transfer process 有权
浅沟槽离散轨道介质(DTM)和模式转移过程

Shallow trench discrete track media (DTM) and pattern transfer process
Abstract:
A shallow trench discrete track media structure is fabricated by etching a magnetic recording layer to provide a plurality of discrete magnetic data tracks separated by shallow trenches. Each shallow trench has a trench floor formed at a depth in the magnetic recording layer that is less than the thickness of the magnetic recording layer. Exposed regions of the magnetic recording layer beneath the trench floor are reacted with reactive plasma to diminish the magnetic moment of the exposed regions.
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