Invention Grant
- Patent Title: Phase change memory device to prevent thermal cross-talk and method for manufacturing the same
- Patent Title (中): 相变存储器件,以防止热串扰及其制造方法
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Application No.: US13241890Application Date: 2011-09-23
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Publication No.: US08422283B2Publication Date: 2013-04-16
- Inventor: Heon Yong Chang
- Applicant: Heon Yong Chang
- Applicant Address: KR Kyoungki-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyoungki-do
- Agency: Ladas & Parry LLP
- Priority: KR10-2007-0031879 20070330
- Main IPC: G11C11/00
- IPC: G11C11/00

Abstract:
A phase change memory device for preventing thermal cross-talk includes lower electrodes respectively formed in a plurality of phase change cell regions of a semiconductor substrate. A first insulation layer is formed on the semiconductor substrate including to the lower electrodes having holes for exposing the respective lower electrodes. Heaters are formed on the surfaces of the respective holes to contact the lower electrodes. A second insulation layer is formed to fill the holes in which the heaters are formed. A mask pattern is then formed on the first and second insulation layers, including the heaters, to have openings that expose portions of the respective heaters having a constant pitch. A phase change layer is formed on the mask pattern including the exposed portions of the heaters and the first and second insulation layers and subsequently, upper electrodes are formed on the phase change layer.
Public/Granted literature
- US20120009758A1 PHASE CHANGE MEMORY DEVICE TO PREVENT THERMAL CROSS-TALK AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-01-12
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