Invention Grant
US08422304B2 Flash memory device and method for manufacturing flash memory device 有权
闪存设备及其制造方法

Flash memory device and method for manufacturing flash memory device
Abstract:
A method of manufacturing a flash memory device is provided. First and second gates are formed on first and second dielectrics and spaced apart from each other on a cell area of a substrate. A third gate is formed on a third dielectric that is formed on first opposing sidewalls of the first gate and extending on a portion of the substrate from the first opposing sidewalls. A fourth gate is formed on a fourth dielectric that is formed on second opposing sidewalls of the second gate and extending on a portion of the substrate from the second opposing sidewalls. The third gate and third dielectric on one of the first opposing sidewalls facing the second gate and the fourth gate and fourth dielectric on one of the second opposing sidewalls facing the first gate are removed. Drain areas are formed at outer sides of the third and fourth gates, and a common source area is formed between the first and second gates.
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