Invention Grant
- Patent Title: X-ray inspection device and X-ray inspection method
- Patent Title (中): X光检查装置和X射线检查方法
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Application No.: US12802401Application Date: 2010-06-07
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Publication No.: US08422630B2Publication Date: 2013-04-16
- Inventor: Yoshiki Matoba
- Applicant: Yoshiki Matoba
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adam & Wilks
- Priority: JP2009-141491 20090612; JP2010-068760 20100324
- Main IPC: G01N23/06
- IPC: G01N23/06

Abstract:
In order to prevent misdetection and erroneous detection by clearly determining only a contrast caused by a foreign matter, there are provided an X-ray inspection method and an X-ray inspection device including: an X-ray tube (11) for irradiating a measurement sample with a characteristic X-ray having energy lower than an X-ray absorption edge of one element contained in the measurement sample and having energy higher than an X-ray absorption edge of a detection element; an X-ray detector (13) for receiving a transmission X-ray obtained when the X-ray passes through the sample; and an operation portion (15) for obtaining a contrast image from a transmission image of the transmission X-ray.
Public/Granted literature
- US20100316187A1 X-Ray inspection device and X-Ray inspection method Public/Granted day:2010-12-16
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