Invention Grant
US08422822B2 Fourier transform deflectometry system and method 有权
傅里叶变换偏转系统及方法

  • Patent Title: Fourier transform deflectometry system and method
  • Patent Title (中): 傅里叶变换偏转系统及方法
  • Application No.: US12743539
    Application Date: 2008-11-06
  • Publication No.: US08422822B2
    Publication Date: 2013-04-16
  • Inventor: Didier BeghuinLuc Joannes
  • Applicant: Didier BeghuinLuc Joannes
  • Applicant Address: BE Nivelles
  • Assignee: Lambda-X
  • Current Assignee: Lambda-X
  • Current Assignee Address: BE Nivelles
  • Agency: Sughrue Mion, PLLC
  • Priority: EP07121009 20071119
  • International Application: PCT/EP2008/065082 WO 20081106
  • International Announcement: WO2009/065740 WO 20090528
  • Main IPC: G06K9/36
  • IPC: G06K9/36
Fourier transform deflectometry system and method
Abstract:
The present invention relates to a Fourier transform deflectometry system (1) and method for the optical inspection of a phase and amplitude object (2) placed in an optical path between a grating (3) and an imaging system (4), at a distance h of said grating 3. The grating (3) forms a contrast-based periodic pattern with spatial frequencies μ0, v0 in, respectively, orthogonal axes x,y in an image plane, and the imaging system (4) comprises an objective (5) and an imaging sensor (6) comprising a plurality of photosensitive elements. Spatial frequencies μ0, v0 are equal or lower than the Nyquist frequencies of the imaging system in the respective x and y axes. According to the method of the invention, a first image of said pattern, distorted by the phase and amplitude object (2), is first captured through the objective (5) by the imaging sensor (6). Then, a Fourier transform of said first image in a spatial frequency domain is calculated, at least one first- or higher-order spectrum of said Fourier transform is selected and shifted in said frequency domain, so as to substantially place it at a central frequency of said Fourier transform, and a reverse Fourier transform said at least one shifted first- or higher-order spectrum of said Fourier transform is performed so as to obtain a complex function g(x,y)=l(x,y)eiφ(x,y), wherein l(x,y) is an intensity and φ(x,y) a phase linked to optical deflection angles θx, θy in, respectively, the directions of the x and y axes, in the following form: φ(x,y)=−2ττh(μ0 tan θx+v0 tan θy).
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