Invention Grant
US08422845B2 Optical input/output device for photo-electric integrated circuit device and method of fabricating same 有权
光电集成电路器件的光输入/输出装置及其制造方法

Optical input/output device for photo-electric integrated circuit device and method of fabricating same
Abstract:
A photo-electric integrated circuit device comprises an on-die optical input/output device. The on-die optical input/output device comprises a substrate having a trench, a lower cladding layer disposed in the trench and having an upper surface lower than an upper surface of the substrate, and a core disposed on the lower cladding layer at a distance from sidewalls of the trench and having an upper surface at substantially the same level as the upper surface of the substrate.
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