Invention Grant
US08423173B2 Load port apparatus, lid member mounting and dismounting apparatus for load port apparatus, and controlling method for lifting mechanisms of mapping apparatus
有权
负载端口装置，负载端口装置的盖构件安装和拆卸装置以及映射装置的提升机构的控制方法
- Patent Title: Load port apparatus, lid member mounting and dismounting apparatus for load port apparatus, and controlling method for lifting mechanisms of mapping apparatus
- Patent Title (中): 负载端口装置，负载端口装置的盖构件安装和拆卸装置以及映射装置的提升机构的控制方法
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Application No.: US12833119Application Date: 2010-07-09
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Publication No.: US08423173B2Publication Date: 2013-04-16
- Inventor: Kensuke Suzuki , Fuminori Asa , Yuuki Taira
- Applicant: Kensuke Suzuki , Fuminori Asa , Yuuki Taira
- Applicant Address: JP Tokyo
- Assignee: Sinfonia Technology Co., Ltd.
- Current Assignee: Sinfonia Technology Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-163347 20090710
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G65/34 ; G06F19/00 ; G06F7/00
Abstract:
A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference of the two apparatus with each other. An interference avoiding sensor apparatus is provided on the lid member mounting and dismounting apparatus and the mapping apparatus and detects that a lid member suction plate of the lid member mounting and dismounting apparatus is disposed at a position lower by a value exceeding a preset value than the arm to which the mapping sensors are attached to enable pivotal motion of the arm without interfering with the lid member suction plate. Then, immediately after the preset value is detected by the interference avoiding sensor apparatus, the arm is pivoted to the mapping position to start the mapping.
Public/Granted literature
Information query
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