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US08423918B2 Structure and methodology for fabrication and inspection of photomasks by a single design system 失效
通过单一设计系统制造和检查光掩模的结构和方法

Structure and methodology for fabrication and inspection of photomasks by a single design system
Abstract:
A method and system for designing a photomask. The method provides a single machine methodology for inspecting photomasks having regions that repeat and regions that do not repeat. The method includes generating a chip dataset representing an integrated circuit chip design to be included in a cell region of a photomask, generating a kerf dataset to be included in the cell region, generating a kerf copy dataset, and merging the chip dataset, the kerf dataset and the kerf copy dataset into a photomask dataset representing a pattern of clear and opaque regions of the photomask.
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