Invention Grant
- Patent Title: Structure and methodology for fabrication and inspection of photomasks by a single design system
- Patent Title (中): 通过单一设计系统制造和检查光掩模的结构和方法
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Application No.: US12719059Application Date: 2010-03-08
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Publication No.: US08423918B2Publication Date: 2013-04-16
- Inventor: Jed H. Rankin , Andrew J. Watts
- Applicant: Jed H. Rankin , Andrew J. Watts
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Richard Kotulak
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method and system for designing a photomask. The method provides a single machine methodology for inspecting photomasks having regions that repeat and regions that do not repeat. The method includes generating a chip dataset representing an integrated circuit chip design to be included in a cell region of a photomask, generating a kerf dataset to be included in the cell region, generating a kerf copy dataset, and merging the chip dataset, the kerf dataset and the kerf copy dataset into a photomask dataset representing a pattern of clear and opaque regions of the photomask.
Public/Granted literature
- US20100162196A1 STRUCTURE AND METHODOLOGY FOR FABRICATION AND INSPECTION OF PHOTOMASKS Public/Granted day:2010-06-24
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