Invention Grant
US08423926B2 Acceptance determining method of blank for EUV mask and manufacturing method of EUV mask 有权
EUV掩模的掩模验证方法和EUV掩模的制造方法

Acceptance determining method of blank for EUV mask and manufacturing method of EUV mask
Abstract:
According to one embodiment, an acceptance determining method of a blank for an EUV mask includes evaluating whether or not an integrated circuit device becomes defective, on the basis of information of a defect contained in a blank for an EUV mask and design information of a mask pattern to be formed on the blank. The integrated circuit device is to be manufactured by using the EUV mask. The EUV mask is manufactured by forming the mask pattern on the blank. And the blank is determined to be non-defective in a case that the integrated circuit device is not to be defective.
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