Invention Grant
- Patent Title: Simulation of the image projected by a mask
- Patent Title (中): 模拟由掩模投影的图像
-
Application No.: US12839817Application Date: 2010-07-20
-
Publication No.: US08423927B2Publication Date: 2013-04-16
- Inventor: Mazen Saied , Emek Yesilada
- Applicant: Mazen Saied , Emek Yesilada
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: The Noblitt Group, PLLC
- Priority: FR0955082 20090721
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
The disclosure concerns a method of simulating the image projected by a mask during photolithography including determining by a processor (702), taking into account the thickness of a masking layer of a mask, a near-field transmission amplitude curve of light passing through the mask across at least one pattern boundary in the initial mask layout; calculating by the processor, for each of a plurality of zones, average values of the curve; and simulating by a simulator (708) the image projected by the initial mask layout during the photolithography based on the average values.
Public/Granted literature
- US20110022219A1 SIMULATION OF THE IMAGE PROJECTED BY A MASK Public/Granted day:2011-01-27
Information query