Invention Grant
- Patent Title: System and method for model based multi-patterning optimization
- Patent Title (中): 基于模型的多图案优化的系统和方法
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Application No.: US13271194Application Date: 2011-10-11
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Publication No.: US08423928B2Publication Date: 2013-04-16
- Inventor: Justin Ghan , Abdurrahman Sezginer
- Applicant: Justin Ghan , Abdurrahman Sezginer
- Applicant Address: US CA San Jose
- Assignee: Cadence Design Systems, Inc.
- Current Assignee: Cadence Design Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Adeli & Tollen LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Some embodiments provide a method for optimally decomposing patterns within particular spatial regions of interest on a particular layer of a design layout for a multi-exposure photolithographic process. Specifically, some embodiments model the spatial region using a mathematical equation in terms of two or more intensities. Some embodiments then optimize the model across a set of feasible intensities. The optimization yields a set of intensities such that the union of the patterns created/printed from each exposure intensity most closely approximates the patterns within the particular regions. Based on the set of intensities, some embodiments then determine a decomposition solution for the patterns that satisfies design constraints of a multi-exposure photolithographic printing process. In this manner, some embodiments achieve an optimal photolithographic printing of the particular regions of interest without performing geometric rule based decomposition.
Public/Granted literature
- US20120102442A1 SYSTEM AND METHOD FOR MODEL BASED MULTI-PATTERNING OPTIMIZATION Public/Granted day:2012-04-26
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