Invention Grant
- Patent Title: MIM capacitor with enhanced capacitance
- Patent Title (中): 具有增强电容的MIM电容器
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Application No.: US12775103Application Date: 2010-05-06
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Publication No.: US08424177B2Publication Date: 2013-04-23
- Inventor: Alexis Farcy , Maryline Thomas , Joaquin Torres , Sonarith Chhun , Laurent-Georges Gosset
- Applicant: Alexis Farcy , Maryline Thomas , Joaquin Torres , Sonarith Chhun , Laurent-Georges Gosset
- Applicant Address: FR Crolles NL Ag Eindhoven
- Assignee: STMicroelectronics (Crolles 2) SAS,NXP B.V. (Dutch Corporation)
- Current Assignee: STMicroelectronics (Crolles 2) SAS,NXP B.V. (Dutch Corporation)
- Current Assignee Address: FR Crolles NL Ag Eindhoven
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: EP06301014 20061004
- Main IPC: H01G7/00
- IPC: H01G7/00
Abstract:
A method of forming a metal-insulator-metal capacitor having top and bottom plates separated by a dielectric layer, one of the top and bottom plates having at least one protrusion extending into a corresponding cavity in the other of the top and bottom plates, the method including the steps of growing one or more nanofibers on a base surface.
Public/Granted literature
- US20110080686A1 MIM CAPACITOR Public/Granted day:2011-04-07
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