Invention Grant
- Patent Title: Active scanner bow compensator
- Patent Title (中): 主动扫描仪弓补偿器
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Application No.: US12618316Application Date: 2009-11-13
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Publication No.: US08424364B2Publication Date: 2013-04-23
- Inventor: Katerina Moloni , Richard Arndt , Lucas Chasteen , Douglas M. Code , Adam Frost , Timothy K. Klemp
- Applicant: Katerina Moloni , Richard Arndt , Lucas Chasteen , Douglas M. Code , Adam Frost , Timothy K. Klemp
- Applicant Address: US WI Middleton
- Assignee: nPoint, Inc.
- Current Assignee: nPoint, Inc.
- Current Assignee Address: US WI Middleton
- Agency: DeWitt Ross & Stevens, S.C.
- Agent Joseph T. Leone, Esq.; Daniel A. Blasiole
- Main IPC: G01C25/00
- IPC: G01C25/00 ; G01P21/00 ; H02N2/06 ; G01Q40/00 ; G01Q10/00

Abstract:
An active scanner bow compensator for use with a scanner is described. The scanner includes a moveable scanning platform supported within a frame. The active scanner bow compensator supports the scanner and includes a frame of reference, sensors, and an actuator. The sensors detect out-of-plane motion of the scanning platform relative to the frame of reference, and the actuators compensate for the out-of-plane motion by adjusting the orientation of the frame relative to the frame of reference. The active scanner bow compensator may be used in atomic force microscopy applications.
Public/Granted literature
- US20100117565A1 ACTIVE SCANNER BOW COMPENSATOR Public/Granted day:2010-05-13
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