Invention Grant
US08424382B2 Microelectromechanical sensor and operating method for a microelectromechanical sensor 失效
微机电传感器和微机电传感器的操作方法

  • Patent Title: Microelectromechanical sensor and operating method for a microelectromechanical sensor
  • Patent Title (中): 微机电传感器和微机电传感器的操作方法
  • Application No.: US12310572
    Application Date: 2007-08-08
  • Publication No.: US08424382B2
    Publication Date: 2013-04-23
  • Inventor: Guenter Spahlinger
  • Applicant: Guenter Spahlinger
  • Applicant Address: DE Freiburg
  • Assignee: Northrop Grumman LITEF GmbH
  • Current Assignee: Northrop Grumman LITEF GmbH
  • Current Assignee Address: DE Freiburg
  • Agent Elliott N. Kramsky
  • Priority: DE102006043412 20060915
  • International Application: PCT/EP2007/007028 WO 20070808
  • International Announcement: WO2008/031480 WO 20080320
  • Main IPC: G01C19/56
  • IPC: G01C19/56
Microelectromechanical sensor and operating method for a microelectromechanical sensor
Abstract:
A microelectromechanical sensor and operating method therefor. The sensor has at least one movable electrode. An electrode arrangement is spaced apart from the movable electrode with a plurality of electrodes that can be driven separately and to which corresponding electrode signals can be applied that can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the movable electrode. An electrode signal generation unit is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode. The electrode signal generation unit generates each electrode signal in a manner dependent on the force application signal, the spring constant signal and the read-out factor signal and matches the electrode signals to one another so that the application of force, the spring constant and the read-out factor of the movable electrode can be set/changed to specific desired values independently of one another.
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