Invention Grant
- Patent Title: Microelectromechanical sensor and operating method for a microelectromechanical sensor
- Patent Title (中): 微机电传感器和微机电传感器的操作方法
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Application No.: US12310572Application Date: 2007-08-08
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Publication No.: US08424382B2Publication Date: 2013-04-23
- Inventor: Guenter Spahlinger
- Applicant: Guenter Spahlinger
- Applicant Address: DE Freiburg
- Assignee: Northrop Grumman LITEF GmbH
- Current Assignee: Northrop Grumman LITEF GmbH
- Current Assignee Address: DE Freiburg
- Agent Elliott N. Kramsky
- Priority: DE102006043412 20060915
- International Application: PCT/EP2007/007028 WO 20070808
- International Announcement: WO2008/031480 WO 20080320
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A microelectromechanical sensor and operating method therefor. The sensor has at least one movable electrode. An electrode arrangement is spaced apart from the movable electrode with a plurality of electrodes that can be driven separately and to which corresponding electrode signals can be applied that can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the movable electrode. An electrode signal generation unit is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode. The electrode signal generation unit generates each electrode signal in a manner dependent on the force application signal, the spring constant signal and the read-out factor signal and matches the electrode signals to one another so that the application of force, the spring constant and the read-out factor of the movable electrode can be set/changed to specific desired values independently of one another.
Public/Granted literature
- US20100186503A1 Microelectromechanical sensor and operating method for a microelectromechanical sensor Public/Granted day:2010-07-29
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