Invention Grant
US08425013B2 Piezoelectric actuator, liquid ejection head, and image forming apparatus 有权
压电致动器,液体喷射头和图像形成装置

Piezoelectric actuator, liquid ejection head, and image forming apparatus
Abstract:
A piezoelectric actuator includes a piezoelectric member having piezoelectric pillars and grooves alternately arrayed. Each of the grooves has a first width at a bottom side of the piezoelectric pillars and a second width at an upper side of the piezoelectric pillars in a direction in which the piezoelectric pillars are arrayed. The first width is greater than the second width.
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