Invention Grant
- Patent Title: Method for depositing of barrier layers on a plastic substrate as well as coating device therefor and a layer system
- Patent Title (中): 用于在塑料基板上沉积阻挡层的方法以及其涂覆装置和层系统
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Application No.: US12418130Application Date: 2009-04-03
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Publication No.: US08425738B2Publication Date: 2013-04-23
- Inventor: Gerd Hoffman , Alexandra L. Quiceno
- Applicant: Gerd Hoffman , Alexandra L. Quiceno
- Applicant Address: US CA Santa Clara MX Puerto Industrial-Altamiro-Tamaulipas
- Assignee: Applied Materials, Inc.,Biofilm S.A.
- Current Assignee: Applied Materials, Inc.,Biofilm S.A.
- Current Assignee Address: US CA Santa Clara MX Puerto Industrial-Altamiro-Tamaulipas
- Agency: Kilpatrick, Townsend & Stockton LLP
- Priority: EP08103386 20080404; EP08155403 20080429
- Main IPC: C23C14/34
- IPC: C23C14/34
Abstract:
The present invention refers to a coating device for depositing of barrier layers on a plastic substrate comprising a first coating station for depositing a first layer comprising a metal and a second coating station for depositing a second layer comprising a resin, wherein a treatment station for treating the deposited first layer is arranged between the first and the second coating stations which comprises sputter means for depositing one or several atomic layers or isles of deposition material. The invention further refers to an appropriate method which can be carried out by the coating device and to a layer system produced thereby.
Public/Granted literature
Information query
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