Invention Grant
US08425741B2 Ion deposition apparatus having rotatable carousel for supporting a plurality of targets
有权
离子沉积设备具有可旋转的转盘，用于支撑多个靶
- Patent Title: Ion deposition apparatus having rotatable carousel for supporting a plurality of targets
- Patent Title (中): 离子沉积设备具有可旋转的转盘，用于支撑多个靶
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Application No.: US12309464Application Date: 2007-07-06
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Publication No.: US08425741B2Publication Date: 2013-04-23
- Inventor: Gary Proudfoot , Christopher David George , Paulo Edurado Lima , Gordon Robert Green , Robert Kenneth Trowell
- Applicant: Gary Proudfoot , Christopher David George , Paulo Edurado Lima , Gordon Robert Green , Robert Kenneth Trowell
- Applicant Address: GB Newport, South Wales
- Assignee: Aviza Technology Limited
- Current Assignee: Aviza Technology Limited
- Current Assignee Address: GB Newport, South Wales
- Agency: Volentine & Whitt, PLLC
- Priority: GB0614499.2 20060721
- International Application: PCT/GB2007/002537 WO 20070706
- International Announcement: WO2008/009889 WO 20080124
- Main IPC: C25B9/00
- IPC: C25B9/00 ; C25B13/00 ; B05B5/025
Abstract:
This invention relates to a broad beam ion deposition apparatus (100) including an ion source (101), a target (102), a tillable substrate table (103) and an auxiliary port (104). The target (102) is in the form of a carousel which carries a number of targets and the ion source (101) is configured to produce a substantially rectangular section beam (105).
Public/Granted literature
- US20100084569A1 ION DEPOSITION APPARATUS Public/Granted day:2010-04-08
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