Invention Grant
- Patent Title: Inkjet printhead bridge beam fabrication method
- Patent Title (中): 喷墨打印头桥梁制造方法
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Application No.: US12548397Application Date: 2009-08-26
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Publication No.: US08425787B2Publication Date: 2013-04-23
- Inventor: Alfred I-Tsung Pan , Kenneth Vandenberghe , Dennis Lazaroff
- Applicant: Alfred I-Tsung Pan , Kenneth Vandenberghe , Dennis Lazaroff
- Applicant Address: US TX Houston
- Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee Address: US TX Houston
- Main IPC: G01D15/00
- IPC: G01D15/00

Abstract:
A method of fabricating a bridge beam of an inkjet printhead employs a cavity formed under the bridge beam and an etch-stop layer that limits a back-surface recess formation. The method includes forming a cavity that connects between a bottom of a pair of trenches in and extending from a front surface of a substrate and depositing an etch-stop layer at a bottom of the cavity. The method further includes forming a recess in a back surface of the substrate, the recess exposing the etch-stop layer and the etch-stop layer limiting a depth of the formed recess. The method further includes removing the exposed etch-stop layer to connect the cavity and the recess, the bridge beam being a portion of the substrate above the formed cavity and between the trenches.
Public/Granted literature
- US20110049092A1 INKJET PRINTHEAD BRIDGE BEAM FABRICATION METHOD Public/Granted day:2011-03-03
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